| 品牌 | 其他品牌 | 價(jià)格區(qū)間 | 0-5萬 |
|---|---|---|---|
| 產(chǎn)地類別 | 進(jìn)口 | 應(yīng)用領(lǐng)域 | 綜合 |
薄層方塊電阻測(cè)量儀-非接觸式
昊量光電新推出用于導(dǎo)電薄膜和薄金屬層方塊電阻測(cè)量的非接觸式薄膜四方針方塊電阻方阻測(cè)量儀EddyCus TF Series，這款非接觸式薄膜四方針方塊電阻方阻測(cè)量儀可以非接觸式實(shí)時(shí)測(cè)量，對(duì)導(dǎo)電薄膜和金屬方塊電阻精確測(cè)量，表征已被隱藏和封裝的導(dǎo)電層，并把測(cè)量數(shù)據(jù)保存和導(dǎo)出。 可用于方塊電阻，方阻測(cè)量，四探針測(cè)試，四探針方阻測(cè)量。
薄層方塊電阻測(cè)量儀-非接觸式主要測(cè)試對(duì)象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
非接觸式單點(diǎn)方阻測(cè)試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點(diǎn)薄層電阻測(cè)量系統(tǒng)。該裝置包含一個(gè)渦流傳感器組，感應(yīng)弱電流到導(dǎo)電薄膜和材料。非接觸式薄膜四方針方塊電阻方阻測(cè)量儀試樣中的感應(yīng)電流產(chǎn)生與測(cè)量對(duì)象的片電阻相關(guān)的電磁場(chǎng)。電渦流技術(shù)不依賴于表面特征或形貌。此外，非接觸式單點(diǎn)方阻測(cè)試儀不需要如已知的2或4點(diǎn)探針測(cè)試(2PP, 4PP)或霍爾效應(yīng)或范德波測(cè)量一樣進(jìn)行任何形式的充分的樣品接觸或備樣。非接觸式單點(diǎn)方阻測(cè)試儀既不需要設(shè)置測(cè)試結(jié)構(gòu)，也不受表面粗糙度或非導(dǎo)電封裝或鈍化層的影響。此外，測(cè)量不會(huì)對(duì)被測(cè)薄膜產(chǎn)生物理影響。渦流儀器不存在機(jī)械磨損，使用壽命長。它的獨(dú)立性與接觸質(zhì)量和它的高速允許實(shí)現(xiàn)高重復(fù)性和準(zhǔn)確性，有利于在研發(fā)和測(cè)試實(shí)驗(yàn)室的各種薄膜的系統(tǒng)質(zhì)量保證。EddyCus工具可以由具有各種數(shù)據(jù)記錄和導(dǎo)出功能的SURAGUS軟件驅(qū)動(dòng)，也可以由SURAGUS軟件開發(fā)套件驅(qū)動(dòng)的客戶軟件驅(qū)動(dòng)。
非接觸式單點(diǎn)方阻測(cè)試儀軟件和設(shè)備控制：
非常用戶友好的軟件
直觀的觸摸顯示導(dǎo)航
實(shí)時(shí)測(cè)量板材電阻和層厚
軟件輔助手動(dòng)映射選項(xiàng)
各種數(shù)據(jù)保存和導(dǎo)出選項(xiàng)
非接觸式薄膜四方針方塊電阻方阻測(cè)量儀產(chǎn)品規(guī)格表
| Measurement technology | Non-contact eddy current sensor |
| substrates | Foils, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) |
| Device dimensions (w/h/d) | 11.4" x 5.5" x 17.5" / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features | Sheet resistance measurement / metal thickness monitor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.3% | < 0.5% | < 0.3% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc | |||||
非接觸式薄膜四方針方塊電阻方阻測(cè)量儀
非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個(gè)運(yùn)動(dòng)的渦流傳感器，每次掃描可測(cè)量高達(dá)90000 (300 x 300)測(cè)量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標(biāo)本進(jìn)行物理接觸，該設(shè)備可以在飛行運(yùn)動(dòng)中進(jìn)行測(cè)量。此外，非接觸式單點(diǎn)方阻測(cè)試儀具有很高的準(zhǔn)確性，因?yàn)樗仟?dú)立于任何接觸質(zhì)量。非接觸式薄膜四方針方塊電阻方阻測(cè)量儀樣品中測(cè)量點(diǎn)的高密度確保了沒有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗(yàn)室中各種薄膜的系統(tǒng)質(zhì)量保證。
產(chǎn)品規(guī)格：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.5% | < 1% | < 0.5% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
便攜式方塊電阻測(cè)試儀
EddyCus TF便攜式1010SR專用于工業(yè)環(huán)境中的接觸片電阻測(cè)量。它使各種行業(yè)的手工質(zhì)量保證成為可能。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications (windshields etc.) |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
| Sheet resistance range (five setups available) | Type very low: 0.001 – 0.1 Ohm/sq Type low: 0.04 – 0.1 Ohm/sq Type standard: 0.3 – 30 Ohm/sq Type high: 0.3 – 50 Ohm/sq Type very high: 0.3 – 100 Ohm/sq |
| Thickness measurement of thin films (e.g. copper) | Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance) |
| Emissivity range | Additional feature, available range is 0.003 – 0.5 |
| Accuracy (for planar solid surfaces, e.g. glass) | 0.001 – 50 Ohm/sq: < 3% 50 – 100 Ohm/sq: < 5% |
| DISPlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) | 3.5" x 7" x 1.9" / 87 mm x 178 mm x 48 mm |
| Weight | 340 g |
| Interfaces | Bluetooth (optional) + data center |
更多詳情請(qǐng)聯(lián)系昊量光電/歡迎直接聯(lián)系昊量光電
關(guān)于昊量光電：
上海昊量光電設(shè)備有限公司是光電產(chǎn)品專業(yè)代理商，產(chǎn)品包括各類激光器、光電調(diào)制器、光學(xué)測(cè)量設(shè)備、光學(xué)元件等，涉及應(yīng)用涵蓋了材料加工、光通訊、生物醫(yī)療、科學(xué)研究、國防、量子光學(xué)、生物顯微、物聯(lián)傳感、激光制造等；可為客戶提供完整的設(shè)備安裝，培訓(xùn)，硬件開發(fā)，軟件開發(fā)，系統(tǒng)集成等服務(wù)。
上海市徐匯區(qū)虹梅路2007號(hào)6號(hào)樓3樓
info@auniontech.com
